BS IEC 62047-33:2019 pdf download.Semiconductor devices - Micro-electromechanical devices
The test points of the device shall be no less than 6 in full range, including full-scale pressure and the zero-scale pressure.
This test shall start from the zero-scale pressure and approach the full-scale pressure (i.e.forward stroke) by increasing load steadily in accordance with the provision. For each testing pressure point, when the pressure is stable， read the output values of the devices on the wafer. Then start from the full-scale pressure and approach the zero-scale pressure (i.e.backward stroke) by decreasing the load steadily in accordance with the provision.There are m test points in the full-scale pressure range and n cycle tests. Then there are an test data at each point in forward and backward stroke respectively. Calculate the average value of each test point in the forward/backward stroke and the overall average value of each test pressure point in the forward and backward stroke.
5.8.1 Test method
Perform the test cycle for three times sequentially under room temperature, the upper limit of operating temperature, the lower limit of working temperature, and then back to the same room temperature. Maintain each temperature for 1 h and test zero output, as well as full-span output of the devices.
Measure the output of the device in the same pressure and at different temperature. The test points of the device shall be no less than 6 in operating temperature range, including room temperature, the upper limit of working temperature, the lower limit of working temperature.
This test shall start from the lowest temperature of the range and approach the highest temperature by increasing load steadily in accordance with the provision. For each testing point, when the temperature is stable, read the output values of the device. Then start from the highest temperature and approach the lowest temperature by decreasing the load steadily in accordance with the provision.
5.9.1.3 Full-span output static pressure deviation
The full-span output static pressure deviation is the percentage based on the change in full-span output of the device between the loaded static pressure and the unloaded static pressure divided by the full-span output of static performance. Measure the difference between the output under the zero-scale pressure and the output under the full-scale pressure in the range. The difference is the full-span output. The high and low pressure terminals should be connected to the maximum static pressure for 5 min. Then the high pressure terminal should be connected to the full-scale pressure and the zero-scale pressure respectively, and measure the difference of the output. The full-span output static pressure deviation is given as Formula (30).BS IEC 62047-33 pdf download.